Features

Applications

Features

Applications

Silicone is polymer which consists of –Si-O-Si- with organic group. Silicone is chemical material having both organic and inorganic properties. In addition to being excellent in heat resistance, weather fastness and electric properties. Silicone products come in various forms such as rubbers and resins. Silicone is widely used in every industry and is an indispensible high performance material.

Applications

• Liquid silicone rubber Adhesive seals / Coating on electric parts, etc. / Molding
• Millable type silicone rubber Gaskets / Rolls / Insulating rubber parts / Heat resisting rubber parts / Flame resisting rubber parts
• Silicone resin Heat resisting paints / Weather resisting / Chemical resisting paints / Release agents / Surface protection of plastics
• Silicone oil Damper oils / Lubricating oils / Foam stabilizer / Lipsticks / Ointment
• Silicone varnish for electrics High temperature insulator / Vanish for mica binding / Varnish for paints
• Silicone varnish for paints Heat resisting paints / Weather resisting paints / Chemical resisting paints
• Silicone as polymer additive Polyurethane foam stabilizer / Polyvinylchloride foam stabilizer / Leveling agent for paints
• Silicone grease Lubricants for ball bearings, gas utansils and high temperature furnaces
• Oil compounds Fillers for electric insulation, moistureproof seals, waterproof seals and heat release
• Releasing Silicone Releasing agent for metal frame of concrete and casting mold / Prevention of copper wire adhesion
• Defoaming Silicone Defoaming agent of paints and latexes mixture / Defoaming agent for waste water treatment
• Water repellent Silicone Moistureproofing of switchboards / Surface protection of rubbers, etc. / Water repellent treatment
• Silicone compounds Plastic modifier / Water repellent treatment of concrete and mortar
• Silicone for household Adhesive sealing agents / Rust preventive lubricants / Protecting and polishing agents
• Silicone for electronics Insulating materials / Potting materials / Coating materials
• Silicone resin fine powder Modifier for rubbers, paints, synthetic resins and cosmetics, etc.

Silicone Rubber Sheet for General Purpose
Hardness : 50 JIS AA
Color : opaque white

General Silicone rubber tube
General Silicone rubber sheet
   Here for size list   PDF : silicone_rubberstd.pdf 

Extruding products in variety

Available hardness range is from 10 degrees to 90 degrees. We are able to meet requirements of special characteristics such as conductivity, noncombustibility, heat resistance, heat radiation, high tear resistance.

We supply silicone rubber sheet of low hardness for masking for lead frame plating.
Hardness 0 ~20 degree Hs JIS A
Thickness 0.3 ~1.5 mm
Substrate PET film with adhesive tape
Bakelite, Others

Please inquire the specification of hardness, thickness and others.
For detail: PDF:Silicone_RubberMASK.pdf

As to carrier for wafer polishing, we use various materials such as metals (SK, SUS etc.) and resin (Epoxy Glass, Alamide). Also, injection moldings with resin and elastomer around the hole are possible to prevent damages on the wafer surfaces.

We are prepared to meet customers’ various requirements. We have accumulated knowledge about resin ranging from general en-pla to super en-pla.

Property of parts manufacturing

In order to meet every requirement, skilled workers input an automatic program of processing conditions such as cutting conditions and tool exchanges. Machines work based on data acquired by such program. Automatic processing by MC and NC enables to produce the parts of great variety efficiently. Also, we have measuring tools of high precision for inspection and measurement so that we would produce products of high precision and high quality as required.

What is recycling cleaning?

It is thorough cleaning of parts like Depo-Shield used in spattering system and etching system. Process of cleaning is removing the deposition film, giving surface treatment, precise cleaning, and degassing drying. Thoroughly cleaned parts are delivered to customers by airtight packaging.

Characteristic

We supply parts of high reliability.

1. Surface of each part is coated by aluminum film or others by plasma or arc　sprays. This improves maintenance of deposition film and decreases particles caused by dropping of particle and coming off of flake.
2. Based on the rising temperature and degassing data, vacuum baking conditions are programmed. This minimizes occurrence of troubles due to degassing from recycling parts.
3. Cleaning is a continuous operation in the clean room from precise cleaning to airtight packaging so that returned parts would be good to be used immediately.
4. Every part is inspected before delivery based on our own inspection standard for quality guarantee.
5. Standardization made it possible to recycle the parts uniformly.

ASM EPSILON® chamber

Square bath / Vertical boat •Reaction tube
Precision fabrication / Chamber and Quartz burner

Glass-like Carbon is one of the carbon materials which generally have heat resistance, electric conductivity and corrosion resistance. In addition to those features, glass-like carbon has gas and liquid impermeability, isotropy, chemical resistance and no particle generation. Moreover, the purification treatment in manufacturing process enables to manufacture very high purity carbon. According to these features, glass-like carbon is mainly applied to several kinds of parts for semiconductor manufacturing equipments.

Features

• Chemical resistance
• Gas and liquid impermeability
• High purity
• No particle generation
• Heat resistance
• X-ray transparency

Application

• Parts for Plasma etch, CVD equipments
• Sputtering target
• High purity chemical resistant parts
• Parts for Analytical equipments
• X-ray transparent plate

Glass-like Carbon Soaking & Coating is a technique to make the combination of graphite particles secure and cover the surface of graphite by Glass-like Carbon. Particular resin is soaked into and coated on graphite base materials and is transformed to Glass-like Carbon by carbonization.

Features

• Glass-like Carbon Coating prevents graphite material from scattering dust.
• Glass-like Carbon Coating covers the surface of graphite material, and at the same time it infiltrated into material.
• Glass-like Carbon Coating prevents discharging gas from graphite material.
• Glass-like Carbon Coating prevents gas penetration into graphite material.
• Glass-like Carbon Coating is applicable to graphite products of various shapes.
• Glass-like Carbon Coating prevents graphite material from reaction to metal or glass.

Application

• Jigs for hermetic seal
• Jigs for electronic parts assembly
• Jigs for semiconductor manufacturing
• Jigs for FPD manufacturing
• Crucible for deposition
• Parts to be used on high temperature and vacuum environment
• Other graphite products

Carbon Adhesive is a heat resistant adhesive of high strength developed for carbon materials (graphite materials, C/C composites etc.). Bonded carbon materials can maintain their characteristics by carbonization of Carbon Adhesive.

Carbon Bead is a spherical Glass-like Carbon with smooth surface. Carbon bead has electric conductivity, excellent heat and chemical resistance as Glass-like Carbon. High hardness and filling uniformity can be achieved as Carbon Bead has good sphericity. Carbon Bead is suitable for filler to give additional character to base material or pore forming material for ceramics.

Representative Value (CB-100)

Median Particle Diameter　100μm
Bulk Density　　　　　　　0.97Mg/m³
True Specific Gravity　　　1.45Mg/m³

Porous Glass-like Carbon is Glass-like Carbon with open pores. Therefore, it has gas and liquid permeability. In addition, it has electric conductivity, excellent heat and chemical resistance as Glass-like Carbon. It is suitable for vacuum chuck and is expected to apply several uses.

Applications

• Vacuum chucking part
• Filter
• Gas dispersion part

Representative Value (AP-100)

• Bulk Density　1.0 Mg/m³

Thermocouple is used as temperature measurement and control sensor for heat treatment process such as oxidation furnace, diffusion furnace, LPCVD furnace, annealing furnace, RTP, Epitaxial growing furnace, etc. Various shapes can be manufactured.

Features

• Accurate measurement of temperature in high temperature furnace
• Using material of high purity

Application

• Temperature measurement and control sensor for heat treatment process

Various types of temperature controller can be offered, such as high precision type, small type, multichannel substrate type, SSR built-in type, etc. 2-channel input model has function of simple comparison calibrating. Other particular model can be also offered according to customer’s request.

Thermoswitch detects and controls the temperature abnormality. There are metal expanding type with good contact precision, liquid expanding type of good seismic resistance, metal expanding type for surface installation with good responsiveness. They apply to wide temperature range, and used not only for heater, but also for oil temperature control, cooling control panel, etc.

Smoke detector of the world’s smallest class detects the fire in the primary stage and protects the important machinery from the fire. It applies to various needs such as application, specs, environment, out-put and controlling system, from normal atmosphere to clean room.

Features

• Very small
• High sensibility
• Vertical structure achieves earlier detect of smoke inflow